Prof. Henry I. Smith, Emeritus Professor of Electrical Engineering and principal investigator in the Research Laboratory of Electronics (RLE) at MIT, was inducted into the National Academy of Inventors (NAI) at the Academy’s 3rd annual conference on March 7, 2014. Prof. Smith was cited “For innovative contributions to micro and nanofabrication technology and applications.” Prof. Smith is inventor or coinventor on a number of innovations that drove the science and engineering of nanotechnology. Some played an important role in the early stages of the field. Others, such as the phase-shift mask and interferometric alignment continue to be widely used in the semiconductor industry to produce deep-sub-100 nm features in modern microchips. Others, such as graphoepitaxy, remain important in research.
Prof. Smith serves as President of LumArray, Inc., an MIT spinoff that is commercializing a new form of maskless lithography that employs an array of microlenses to achieve higher throughput, larger areas and higher pattern-placement accuracy. He holds over 40 US patents and has published over 400 technical articles. Prof. Smith is a member of the National Academy of Engineering and a Fellow of the American Academy of Arts and Sciences, the IEEE, the Optical Society of America, the National Academy of Inventors and the International Society for Nanomanufacturing.
The NAI Fellows Program, now in its third year has 244 Fellows worldwide representing 216 universities and governmental and non-profit research institutions. Collectively, the Fellows hold 9,000 issued U.S. patents.