Tuesday, November 13, 2012, 34-101 • 4:00pm-5:00pm, Refreshments at 3:30pm in 38-166
MEMS devices are at 'the heart' of many microsystems that are providing paradigm shifts in sensing, communication, and navigation. Integrated timing and inertial navigation systems rely on CMOS processing 'brains' to interface with micromechanical devices and enable reconfiguration, sensor fusion and self-calibration in unprecedented ways. This talk will present a scalable MEMS platform that enables the co-integration of a wide array of devices, and discuss its interface with CMOS to create 3D integrated microsystems.
Farrokh Ayazi is a professor of Electrical and Computer Engineering at Georgia Tech, and the co-founder and CTO of Qualtré, a spin-out from his research laboratory that commercializes bulk-acoustic-wave (BAW) silicon gyroscopes and inertial sensors for personal navigation systems. He is an editor for the IEEE Transactions on Electron Devices and IEEE Journal of Microelectromechanical Systems. He has published more than 200 scientific articles and holds 30 US patents.