EECS professor of electrical engineering and member of the Research Laboratory of Electronics, Henry I. Smith is one of eight MIT faculty members who were inducted into the American Academy of Arts and Sciences (AAAS) as part of its new class of 190 fellows and 22 foreign honorary members. The Academy held its annual induction ceremony on Oct. 11 at its Cambridge, Mass., headquarters. Read more about the class of 2008 Fellows and this event.
Prof. Smith is recognized by the AAAS as "the father of x-ray lithography." His research includes nanofabrication, electronic and photonic devices, and a wide range of applications of nanostructures.
Smith and his co-workers are responsible for a number of innovations in nanoscale science and engineering, including: comformable-photomask lithography, x-ray lithography, the phase-shift mask, the attenuating phase shifter, spatial-phase-locked e-beam lithography, achromatic-interference lithography, spatial-frequency doubling, coherent-diffraction lithography, immersion photolithography, zone-plate-array lithography, absorbance-modulation optical lithography, interferometric alignment, graphoepitaxy, subboundary entrainment, templated self-assembly, nanomembrane assembly, and a variety of quantum-effect, short-channel, single-electron, nanomagnetic, photonic-crystal and microphotonic devices. Prof. Smith holds over 30 US patents and has published over 400 technical articles.
Congratulations Prof. Smith!