MIT Department of Electrical Engineering & Computer Science

E E C S

Minimized Micromachined Gyros

John Geen
Analog Devices Inc.

Tuesday, February 8, 2000
4:00 PM (reception 3:30)
Edgerton Hall, Room 34-101
MTL VLSI Seminar

Abstract

ADI manufactures about half a million micromachined inertial sensors every week. The production process is a 3um BIMOS with a number of features such as thin film resistors which make it flexible for analog design but unsuitable for VLSI. Commercial success is largely measured by the least silicon area for a given functionality so complex designs are not favored. Indeed, the trend has been to fewer and fewer transistors so that the recent, more advanced and functionally sophisticated designs have less than a hundred. This talk outlines one, system-level approach to micromachined gyro design focused on minimizing cost.


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Created: Jan 28, 2000  | Modified: Jan 30, 2000
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