MIT Department of Electrical Engineering & Computer Science

EECS Spring 1999 Catalogue Supplement

6.972 Semiconductor Manufacturing

MW 11-12:30, 38-166
Prof. Duane Boning, 39-567, x0931
Prerequisite: 6.152J or equivalent
3-0-9

State of the art semiconductor manufacturing demands engineering expertise in several areas, including process physics, statistical methods and process control, environmental issues, and operational decision making. It is the purpose of this class to go beyond process physics in order to build the knowledge and develop skills fundamental to the modeling, design, and operation of modern semiconductor plants and processes. Specific topics include statistical foundations for semiconductor manufacturing science; design of experiments; response surface modeling; process optimization; statistical process control; sensor-based monitoring and diagnosis; feedback control appropriate to integrated circuit fabrication; defect and yield modeling; spatial variation modeling; yield learning; facility, equipment, and material issues related to environment, health and safety; planning, scheduling and computer integrated operation of complex semiconductor manufacturing systems.