MIT Department of Electrical Engineering & Computer Science

E E C S

EECS Spring 1997 Catalogue Supplement

6.972 Semiconductor Manufacturing (H)

MW 2:30-4, 34-301
Prof. Duane Boning, 39-567, x0931
3-0-9
State of the art semiconductor manufacturing demands extensive engineering expertise in several areas, including process physics, statistical methods and process control, environmental issues, and operational decision making. It is the purpose of this course to go beyond basic process physics in order to build the knowledge and develop skills fundamental to the modeling, design, and operation of modern semiconductor plants and processes. Specific topics include statistical design of experiments, response surface modeling, and process/device optimization; statistical process control, sensor systems and monitoring methods, and feedback control appropriate to integrated circuit fabrication; defect and yield modeling, spatial variation modeling, yield learning; examination of facility, equipment, and material issues related to environment, health and safety; and finally the computer integrated modeling and operation of complex semiconductor manufacturing systems.
URL of this page: http://www-eecs.mit.edu/AY96-97/spring-cat/6972.html
Editor: Mibsy Brooks | Created: Dec 2, 1996 | Modified: Jan 10, 1997
Related page: EECS Spring 1997 Catalogue Supplement
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