Henry I. Smith recipient of the 2003 Bacus Prize of the International Society for Optical Engineering (SPIE)

September 15, 2003

In September 2003, EECS Professor Henry I. Smith (and member of the Research Laboratory of Electronics) and coauthors Dr. Mark L. Schattenburg (Staff, MIT Center for Space Research), Dr. Erik H. Anderson (Lawrence Berkeley Laboratory) and Dr. Yao-Ching Ku (Taiwan Seminconductor Manufacturing Company, Taiwan, ROC)received the 2003 Bacus Prize of the International Society for Optical Engineering (SPIE) for the invention and demonstration of the attenuated phase-shift mask technology, based on work done at MIT in 1988. The attenuated phase-shift mask technology is now widely used in semiconductor manufacturing to achieve finer linewidths on silicon chips used in computers and other consumer products.