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MIT Electrical Engineering and Computer Science
Spring 2001 Catalogue Supplement |
MW 1-2:30, Room 26-204
Prof. Boning, Room 39-567B, 3-0931
Prereq.: 6.152J or equivalent, 6.041 or equivalent
3-0-9
Qualifies as a subject in the Devices, Circuits and Systems Engineering Concentration
Statistical modeling and control of semiconductor fabrication processes and plants. Design of experiments, response surface modeling, and process optimization. Defect and parametric yield modeling; process/device/circuit yield optimization. Monitoring, diagnosis, and feedback control of equipment and processes. Analysis and scheduling of semiconductor manufacturing operations.
Subject web site: http://www-mtl.mit.edu/6.973