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MIT Electrical Engineering and Computer Science
EECS Event |
Thursday, April 26, 2001
2:00 PM (refreshments 1:45)
Grier Room, Room 34-401A
EECS Special Seminar
Abstract
Although MEMS technology was initially based on conventional IC fabrication techniques and materials and was primarily used for automotive and industrial applications, it has since expanded in scope dramatically to include a broad range of materials, fabrication techniques and applications. In addition, some of the greatest opportunities and challenges for MEMS technology exist when (1) integrating non-conventional materials (e.g., ferromagnetic materials) with silicon-based MEMS and ICs to achieve expanded capabilities and (2) using MEMS to physically interface with their environment (i.e., not isolated in a sealed package). Novel MEMS research efforts directed at both of these challenges and opportunities will be described in this talk. First, the design, fabrication, and testing of microsensors and microactuators that exploit the advantages enabled by the integration of ferromagnetic materials with MEMS and IC's will be discussed. The application and commercialization of ferro- magnetic MEMS in optical cross-connect switches will be featured. Second, the use of micromachining and MEMS technologies to create novel neuroscientific instruments and devices will also be examined and on-going research efforts in this field will be outlined. Specific examples include: miniature deep-brain stimulator systems with micromachined multi-electrode probes, microelectrode development for high-density retinal prosthetics, and miniature wireless neural transceivers. Lastly, a graduate-level training program in the new field of NeuroEngineering will be presented.