|
|
MIT Electrical Engineering and Computer Science
EECS Event |
Tuesday, March 20, 2001
4:00 PM (reception 3:30)
Edgerton Hall, Room 34-101
MTL VLSI Seminar and Boston Area MEMS Seminar
Abstract
The size, power and cost reduction in sensing and computing generated a need for comparable performances in the area of actuation. Silicon technology provided the right development platform for sensors and electronics, but its usefulness in actuation is limited. This talk will introduce the Mesoscale Actuators on Plastic Substrates (MAPS). Based on rolling-contact, electrostatic actuation, and on low cost, easily structurable plastic substrates, these devices are used as building blocks for large 2D and 3D arrays of low weight, low power and low cost actuators. The structural simplicity of the electrostatic actuation and the versatility of plastic fabrication allow new concepts to be implemented. An example is the dual diaphragm pump, probably the most compact and versatile micro- and meso-scale pump developed to date. The talk will discuss MAPS’ applications stretching from portable sampling systems used in landmine detection to large deployable gossamer reflectors for space exploration.